Ellipsometer

alpha-SE, J. A. Whollam
PiQuET Laboratory
With fast measurement speeds and push-button operation, the alpha 2.0 is ideal for qualifying transparent thin films. Single-layer dielectrics on silicon or glass substrates can be measured in seconds. Also, patented technology allows accurate measurements on any substrate: metal, semiconductor, or glass.
Applications: transparent and adsorbing thin films thickness or optical constants measurements - Types of film: metal, dielectric, organics, semiconducting single or multilayers. - Wavelength range: 380 – 900 nm - Number of wavelengths: 180 - Angles of incidence: 65°, 70°, 75° - Complete spectrum acquisition rate: 3 s in fast mode, 10 s in standard mode, 30 s in high-precision mode - Sample size: up to 200 mm in diameter and 16 mm thick - Few steps: measurement of psi and delta, model, data fitting - Good practice as recommended by Woollam: one-angle measurement is enough on thin film, three-angles measurements are best for thick films (t > 1 μm)
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