Sputter Coater

QUORUM Q150T S PLUS
Chilab ITEM Laboratory
This device is a versatile sputter coater/turbo evaporator for preparing specimens for examination by electron microscopy.
Instrument case: 590mm x 521mm x 420mm - Work Chamber: Borosilicate glass: 127 mm (height) x 152.5 mm (internal diameter) - Safety Shield: PET - Ultimate Vacuum: 5 x 10-5 mbar - Vacuum Gauge Range: 1000 to < 1x10-4 mbar - Fuse T: 10A ceramic (5x20 mm); fuse standard IEC60127-2 - Target: Disc style, 57 mm (diameter) x 0.3 mm (thickness) (chromium supplied as standard) - Deposition Current: 1-150 mA - Deposition Rate: 0.1-20 nm/min e.g. for gold - Sputter Time: 0-60 min
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